Application

15618203 · Charged Particle Beam Device

Filed 2017-06-09 · Granted · Patent 10249474 (2019-04-02) The official file ↗The patent and its PDF ↗ · Art unit 2881 · Examiner Hanway Chang Typical · CPC H01J2237/3045 · Hitachi High-Technologies Corporation · CROWELL & MORING LLP

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

11.5 mo

to disposition 21.7 mo

Statutes raised

1 actions read

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