Application

15626123 · Determining a Configuration for an Optical Element Positioned in a Collection Aperture During Wafer Inspection

Filed 2017-06-18 · Granted · Patent 10215713 (2019-02-26) The official file ↗The patent and its PDF ↗ · Art unit 2886 · Examiner Isiaka O Akanbi Hard · CPC G01N 21/9501 · KLA-Tencor Corporation · Entropy Matters LLC

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

9.4 mo

to disposition 20.3 mo

Statutes raised

102 103 DP

1 actions read

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