Application

15627518 · WAFER-BASED LIGHT SOURCE PARAMETER CONTROL

Filed 2017-06-20 · Granted · Patent 10036960 (2018-07-31) The official file ↗The patent and its PDF ↗ · Art unit 2882 · Examiner Deoram Persaud Typical · CPC G03F 7/70358 · Cymer, LLC · ASML CIP (San Diego) / DMIPG

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

6.6 mo

to disposition 13.3 mo

Statutes raised

1 actions read

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