Application

15637538 · ION IMPLANTATION SYSTEM HAVING BEAM ANGLE CONTROL IN DRIFT AND DECELERATION MODES

Filed 2017-06-29 · Granted · Patent 10037877 (2018-07-31) The official file ↗The patent and its PDF ↗ · Art unit 2881 · Examiner Jason L McCormack Typical · CPC H01J 49/20 · Axcelis Technologies, Inc. · Eschweiler & Potashnik, LLC (Axcelis)

Office actions

first was Notice of allowance

RCEs

no appeal

To first action

9.2 mo

to disposition 13.0 mo

Statutes raised

0 actions read

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