Application

15642359 · SUBSTRATE PROCESSING APPARATUS

Filed 2017-07-06 · Granted · Patent 10324385 (2019-06-18) The official file ↗The patent and its PDF ↗ · Art unit 2882 · Examiner Deoram Persaud Typical · CPC G03F 7/70891 · MAPPER LITHOGRAPHY IP B.V. · HOYNG ROKH MONEGIER B.V.

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

11.5 mo

to disposition 23.4 mo

Statutes raised

103 DP

1 actions read

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