Application

15649161 · Patterning Device Support, Lithographic Apparatus, And Method Of Controlling Patterning Device Temperature

Filed 2017-07-13 · Granted · Patent 9977351 (2018-05-22) The official file ↗The patent and its PDF ↗ · Art unit 2882 · Examiner Michelle M Iacoletti Typical · CPC G03F 7/70875 · ASML Netherlands B.V. · STERNE, KESSLER, GOLDSTEIN & FOX P.L.L.C.

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

1.7 mo

to disposition 10.3 mo

Statutes raised

103

1 actions read

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