PATLY.AIApplication
15664554 · METHOD AND APPARATUS FOR ENHANCED LIFETIME AND PERFORMANCE OF ION SOURCE IN AN ION IMPLANTATION SYSTEM
Filed 2017-07-31 · Abandoned The official file ↗ · Art unit 2881 · Examiner Wyatt A Stoffa Hard · CPC H10P 30/204 · Entegris, Inc. · Entegris, Inc.
Office actions
2
first was Restriction requirement
RCEs
0
no appeal
To first action
14.1 mo
to disposition 29.5 mo
Statutes raised
102 103
2 actions read