Application

15666666 · Electron Beam Apparatus with High Resolutions

Filed 2017-08-02 · Granted · Patent 10096447 (2018-10-09) The official file ↗The patent and its PDF ↗ · Art unit 2881 · Examiner Bernard E Souw Easy · CPC H01J 37/145 · KLA-Tencor Corporation · KLA Corporation / Hodgson Russ LLP

Office actions

first was Notice of allowance

RCEs

no appeal

To first action

9.7 mo

to disposition 14.2 mo

Statutes raised

0 actions read

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