PATLY.AIApplication
15672797 · SCANNING ELECTRON MICROSCOPE OBJECTIVE LENS CALIBRATION USING X-Y VOLTAGES ITERATIVELY DETERMINED FROM IMAGES OBTAINED USING SAID VOLTAGES
Filed 2017-08-09 · Granted · Patent 10790114 (2020-09-29) The official file ↗The patent and its PDF ↗ · Art unit 2881 · Examiner James J Choi Hard · CPC G02B 21/008 · KLA-Tencor Corporation · KLA Corporation / Hodgson Russ LLP
Office actions
2
first was Non-final rejection
RCEs
1
no appeal
To first action
21.0 mo
to disposition 37.7 mo
Statutes raised
103
2 actions read