Application
15700754 · ONLINE CALIBRATION FOR REPETITION RATE DEPENDENT PERFORMANCE VARIABLES
Filed 2017-09-11 · Granted · Patent 10727642 (2020-07-28) The official file ↗The patent and its PDF ↗ · Art unit 2882 · Examiner Colin Wright Kreutzer Typical · CPC H01S 3/1305 · ASML NETHERLANDS B.V. · ASML CIP (San Diego) / DMIPG
Office actions
2
first was Non-final rejection
RCEs
1
no appeal
To first action
12.0 mo
to disposition 34.5 mo
Statutes raised
101 102 103 112 DP
2 actions read