Application

15723266 · WAFER HOLDER AND TEMPERATURE CONDITIONING ARRANGEMENT AND METHOD OF MANUFACTURING A WAFER

Filed 2017-10-03 · Granted · Patent 12249523 (2025-03-11) The official file ↗The patent and its PDF ↗ · Art unit 1718 · Examiner Charlee Bennett Typical · CPC H10P 72/0436 · Evatec AG · McDonald Hopkins LLC

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

25.7 mo

to disposition 89.2 mo

Statutes raised

103 112

9 actions read

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