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15782690 · METHODS AND APPARATUSES FOR ELECTROPLATING AND SEED LAYER DETECTION

Filed 2017-10-12 · Granted · Patent 10196753 (2019-02-05) The official file ↗The patent and its PDF ↗ · Art unit 2886 · Examiner Md M Rahman Easy · CPC H10P 14/47 · Lam Research Corporation · WEAVER AUSTIN VILLENEUVE & SAMPSON - LAMR/NOVL

Office actions
0
first was Ex parte Quayle
RCEs
0
no appeal
To first action
8.1 mo
to disposition 15.8 mo
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0 actions read
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