Application

15789125 · MIRROR, MORE PARTICULARLY FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS

Filed 2017-10-20 · Granted · Patent 10247862 (2019-04-02) The official file ↗The patent and its PDF ↗ · Art unit 2882 · Examiner Michelle M Iacoletti Typical · CPC G02B 5/0891 · Carl Zeiss SMT GmbH · EDELL, SHAPIRO & FINNAN, LLC

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

10.1 mo

to disposition 17.4 mo

Statutes raised

112

1 actions read

Unlock the prosecution timelineIncluded in Pro, from $29 a month. Cancel any time.