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15789416 · AIR GAP SPACER FORMATION FOR NANO-SCALE SEMICONDUCTOR DEVICES

Filed 2017-10-20 · Granted · Patent 10115629 (2018-10-30) The official file ↗The patent and its PDF ↗ · Art unit 2822 · Examiner Michael Manh Trinh Typical · CPC H10W 20/072 · International Business Machines Corporation · HG Law LLP (Adeia)

Office actions
1
first was Non-final rejection
RCEs
0
no appeal
To first action
5.4 mo
to disposition 12.3 mo
Statutes raised
102 103
1 actions read
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