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15820811 · METHOD FOR FABRICATING AUTO-ALIGNED INTERCONNECTION ELEMENTS FOR A 3D INTEGRATED CIRCUIT

Filed 2017-11-22 · Granted · Patent 10115637 (2018-10-30) The official file ↗The patent and its PDF ↗ · Art unit 2828 · Examiner Sheikh Maruf Easy · CPC H10D 88/01 · COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · OBLON, MCCLELLAND, MAIER & NEUSTADT, L.L.P.

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first was Notice of allowance
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To first action
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to disposition 11.2 mo
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