Application

15822276 · INTEGRATION OF DUAL REMOTE PLASMAS SOURCES FOR FLOWABLE CVD

Filed 2017-11-27 · Granted · Patent 10934620 (2021-03-02) The official file ↗The patent and its PDF ↗ · Art unit 1716 · Examiner Rudy Zervigon Easy · CPC C23C 16/452 · Applied Materials, Inc. · PATTERSON & SHERIDAN, LLP - - APPLIED MATERIALS

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

21.6 mo

to disposition 39.1 mo

Statutes raised

103

3 actions read

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