Application

15822894 · TEMPERATURE CONTROLLED ION SOURCE

Filed 2017-11-27 · Granted · Patent 10262833 (2019-04-16) The official file ↗The patent and its PDF ↗ · Art unit 2881 · Examiner David E Smith Typical · CPC H01J 37/3002 · Varian Semiconductor Equipment Associates, Inc. · Nields, Lemack & Frame, LLC - Varian

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

9.5 mo

to disposition 16.6 mo

Statutes raised

103 DP

1 actions read

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