Application

15823247 · SUBSTRATE HOLDER, LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, AND METHOD OF MANUFACTURING A SUBSTRATE HOLDER

Filed 2017-11-27 · Granted · Patent 10126663 (2018-11-13) The official file ↗The patent and its PDF ↗ · Art unit 2882 · Examiner Steven H Whitesell Typical · CPC G03F 7/70716 · ASML NETHERLANDS B.V. · Pillsbury Winthrop Shaw Pittman, LLP

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

5.0 mo

to disposition 11.5 mo

Statutes raised

102 DP

1 actions read

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