Application

15824686 · LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

Filed 2017-11-28 · Granted · Patent 10209629 (2019-02-19) The official file ↗The patent and its PDF ↗ · Art unit 2882 · Examiner Hung Nguyen Easy · CPC G03F 7/70341 · ASML NETHERLANDS B.V. · Pillsbury Winthrop Shaw Pittman, LLP

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

6.5 mo

to disposition 14.7 mo

Statutes raised

103 DP

1 actions read

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