Application

15826059 · METHOD OF ETCHING POROUS FILM

Filed 2017-11-29 · Granted · Patent 10236162 (2019-03-19) The official file ↗The patent and its PDF ↗ · Art unit 1716 · Examiner Allan W Olsen Easy · CPC H10P 50/242 · TOKYO ELECTRON LIMITED · ROTHWELL, FIGG, ERNST & MANBECK, P.C.

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

6.8 mo

to disposition 15.6 mo

Statutes raised

1 actions read

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