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15828938 · Minimizing Field Size to Reduce Unwanted Stray Light

Filed 2017-12-01 · Granted · Patent 10739276 (2020-08-11) The official file ↗The patent and its PDF ↗ · Art unit 2884 · Examiner Djura Malevic Hard · CPC H10P 74/277 · KLA-Tencor Corporation · KLA Corporation / Hodgson Russ LLP

Office actions
3
first was Non-final rejection
RCEs
1
no appeal
To first action
15.5 mo
to disposition 32.3 mo
Statutes raised
103
2 actions read
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