Application

15878747 · METHOD AND DEVICE FOR MONITORING MULTIPLE MIRROR ARRAYS IN AN ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS

Filed 2018-01-24 · Abandoned The official file ↗ · Art unit 2882 · Examiner Colin Wright Kreutzer Typical · CPC G02B 26/0833 · Carl Zeiss SMT GmbH · FISH & RICHARDSON P.C. (BO)

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

4.1 mo

to disposition 13.2 mo

Statutes raised

102 103 112 DP

1 actions read

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