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Application

15894223 · LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

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Filed 2018-02-12 · Granted · Patent 10216102 (2019-02-26) The official file ↗The patent and its PDF ↗ · Art unit 2882 · Examiner Hung Nguyen Easy · CPC H10P 76/2041 · ASML NETHERLANDS B.V. · Pillsbury Winthrop Shaw Pittman, LLP

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to disposition 12.5 mo
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