Application

15905969 · PHOTOLITHOGRAPHY METHOD AND SYSTEM BASED ON HIGH STEP SLOPE

Filed 2018-02-27 · Granted · Patent 10816903 (2020-10-27) The official file ↗The patent and its PDF ↗ · Art unit 2882 · Examiner Michelle M Iacoletti Typical · CPC G03F 7/203 · CSMC TECHNOLOGIES FAB1 CO., LTD. · Widerman Malek, PL

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

19.1 mo

to disposition 32.0 mo

Statutes raised

0 actions read

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