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15912628 · EXTREME ULTRAVIOLET LIGHT GENERATING SYSTEM

Filed 2018-03-06 · Granted · Patent 10085334 (2018-09-25) The official file ↗The patent and its PDF ↗ · Art unit 2881 · Examiner Bernard E Souw Easy · CPC H05G 2/0086 · Gigaphoton Inc. · Studebaker Brackett PLLC

Office actions
0
first was Notice of allowance
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no appeal
To first action
3.4 mo
to disposition 6.7 mo
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