Application

15916962 · MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) STRUCTURES AND DESIGN STRUCTURES

Filed 2018-03-09 · Granted · Patent 10549987 (2020-02-04) The official file ↗The patent and its PDF ↗ · Art unit 2816 · Examiner Lauren R Bell Hard · CPC B81C 1/0015 · INTERNATIONAL BUSINESS MACHINES CORPORATION · INACTIVE INTERNATIONAL BUSINESS MACHINES CORP

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

1.1 mo

to disposition 22.9 mo

Statutes raised

101 112 DP

1 actions read

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