Application

15922172 · RF METROLOGY SYSTEM FOR A SUBSTRATE PROCESSING APPARATUS INCORPORATING RF SENSORS WITH CORRESPONDING LOCK-IN AMPLIFIERS

Filed 2018-03-15 · Granted · Patent 10432248 (2019-10-01) The official file ↗The patent and its PDF ↗ · Art unit 2649 · Examiner Nguyen Thanh Vo Easy · CPC H04B 1/44 · Lam Research Corporation · LAM RESEARCH CORPORATION

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

11.9 mo

to disposition 18.6 mo

Statutes raised

112

1 actions read

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