Application

15936074 · CHARGED PARTICLE BEAM APPARATUS

Filed 2018-03-26 · Granted · Patent 10510508 (2019-12-17) The official file ↗The patent and its PDF ↗ · Art unit 2881 · Examiner Eliza W Osenbaugh-Stewart Typical · CPC G03F 1/20 · HITACHI HIGH-TECH SCIENCE CORPORATION · Bruce L. Adams

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

13.2 mo

to disposition 20.7 mo

Statutes raised

102 103

1 actions read

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