Application
15947409 · POST EXPOSURE PROCESSING APPARATUS
Filed 2018-04-06 · Granted · Patent 10401742 (2019-09-03) The official file ↗The patent and its PDF ↗ · Art unit 2882 · Examiner Hung Nguyen Easy · CPC G03F 7/20 · Applied Materials, Inc. · PATTERSON & SHERIDAN, LLP - - APPLIED MATERIALS
Office actions
2
first was Restriction requirement
RCEs
0
no appeal
To first action
6.0 mo
to disposition 16.9 mo
Statutes raised
101 103 DP
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