Application

15948736 · APPARATUS AND METHOD FOR CONTROLLING ION BEAM PROPERTIES USING ENERGY FILTER

Filed 2018-04-09 · Granted · Patent 10468224 (2019-11-05) The official file ↗The patent and its PDF ↗ · Art unit 2881 · Examiner David A Vanore Easy · CPC H01J 27/024 · Varian Semiconductor Equipment Associates, Inc. · KDW Firm PLLC - Varian/Applied Materials (85525)

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

12.7 mo

to disposition 18.9 mo

Statutes raised

112

1 actions read

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