Application

15963054 · METHODS AND SYSTEMS FOR INSPECTION OF WAFERS AND RETICLES USING DESIGNER INTENT DATA

Filed 2018-04-25 · Granted · Patent 10713771 (2020-07-14) The official file ↗The patent and its PDF ↗ · Art unit 2666 · Examiner Ruiping Li Typical · CPC G01N 21/9501 · KLA-Tencor Technologies Corporation · Entropy Matters LLC

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

17.3 mo

to disposition 26.6 mo

Statutes raised

103

1 actions read

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