Application

15963270 · ANTIMONY CO-DOPING WITH PHOSPHORUS TO FORM ULTRASHALLOW JUNCTIONS USING ATOMIC LAYER DEPOSITION AND ANNEALING

Filed 2018-04-26 · Granted · Patent 10522354 (2019-12-31) The official file ↗The patent and its PDF ↗ · Art unit 2894 · Examiner Caleb E Henry Typical · CPC H10P 32/1404 · Lam Research Corporation · LAM RESEARCH CORPORATION

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

14.4 mo

to disposition 20.2 mo

Statutes raised

103

1 actions read

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