Application

15963278 · PROJECTION OBJECTIVE FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS

Filed 2018-04-26 · Abandoned The official file ↗ · Art unit 2882 · Examiner Colin Wright Kreutzer Typical · CPC G02B 13/24 · Carl Zeiss SMT GmbH · FISH & RICHARDSON P.C. (BO)

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

5.0 mo

to disposition 12.4 mo

Statutes raised

103 DP

1 actions read

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