Application

15966918 · DECONVOLUTION TO REDUCE THE EFFECTIVE SPOT SIZE OF A SPECTROSCOPIC OPTICAL METROLOGY DEVICE

Filed 2018-04-30 · Granted · Patent 10274367 (2019-04-30) The official file ↗The patent and its PDF ↗ · Art unit 2857 · Examiner Elias Desta Easy · CPC G01J 3/28 · Nanometrics Incorporated · Paradice and Li, LLP

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

5.0 mo

to disposition 12.0 mo

Statutes raised

101

1 actions read

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