Application

15978882 · OPTICAL MODULE FOR A MICROLITHOGRAPHY OBJECTIVE HOLDING OPTICAL ELEMENTS WITH SUPPORTING DEVICE LOCATED IN NON-EQUIDISTANT MANNER

Filed 2018-05-14 · Abandoned The official file ↗ · Art unit 2882 · Examiner Christina A Riddle Typical · CPC G03F 7/20 · Carl Zeiss SMT GmbH · FISH & RICHARDSON P.C. (BO)

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

24.3 mo

to disposition 32.7 mo

Statutes raised

103 DP

1 actions read

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