Application

15994958 · LOCAL PURGE WITHIN METROLOGY AND INSPECTION SYSTEMS

Filed 2018-05-31 · Granted · Patent 10451542 (2019-10-22) The official file ↗The patent and its PDF ↗ · Art unit 2877 · Examiner Tri T Ton Typical · CPC G01N 21/15 · Nanometrics Incorporated · Paradice and Li, LLP

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

11.0 mo

to disposition 16.7 mo

Statutes raised

0 actions read

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