Application

16015323 · System And Methods Using An Inline Surface Engineering Source

Filed 2018-06-22 · Granted · Patent 11069511 (2021-07-20) The official file ↗The patent and its PDF ↗ · Art unit 2891 · Examiner Dmitriy Yemelyanov Typical · CPC H01J 37/3171 · Varian Semiconductor Equipment Associates, Inc. · Nields, Lemack & Frame, LLC - Varian

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

13.6 mo

to disposition 36.9 mo

Statutes raised

102 103

3 actions read

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