Application

16029130 · REACTOR SYSTEM FOR SUBLIMATION OF PRE-CLEAN BYPRODUCTS AND METHOD THEREOF

Filed 2018-07-06 · Granted · Patent 10519541 (2019-12-31) The official file ↗The patent and its PDF ↗ · Art unit 1711 · Examiner Benjamin Lee Osterhout Easy · CPC H10P 70/00 · ASM IP HOLDING B.V. · SAND, SEBOLT & WERNOW CO., LPA

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

5.9 mo

to disposition 17.8 mo

Statutes raised

103

1 actions read

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