PATLY.AIApplication
16029471 · METHOD AND APPARATUSES FOR REDUCING POROGEN ACCUMULATION FROM A UV-CURE CHAMBER
Filed 2018-07-06 · Granted · Patent 11177131 (2021-11-16) The official file ↗The patent and its PDF ↗ · Art unit 1716 · Examiner Stanislav Antolin Hard · CPC H10P 72/0402 · Novellus Systems, Inc. · WEAVER AUSTIN VILLENEUVE & SAMPSON - LAMR/NOVL
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first was Non-final rejection
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30.4 mo
to disposition 40.4 mo
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