Application

16037894 · TECHNIQUES, SYSTEM AND APPARATUS FOR SELECTIVE DEPOSITION OF A LAYER USING ANGLED IONS

Filed 2018-07-17 · Granted · Patent 10879055 (2020-12-29) The official file ↗The patent and its PDF ↗ · Art unit 1794 · Examiner Rodney Glenn McDonald Typical · CPC H10P 14/6329 · Varian Semiconductor Equipment Associates, Inc. · KDW Firm PLLC - Varian/Applied Materials (85525)

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

18.9 mo

to disposition 29.4 mo

Statutes raised

102 103

2 actions read

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