Application

16042871 · Charged Particle Source

Filed 2018-07-23 · Granted · Patent 10468227 (2019-11-05) The official file ↗The patent and its PDF ↗ · Art unit 2881 · Examiner Phillip A Johnston Typical · CPC H01J 37/143 · Hermes Microvision, Inc. · Finnegan/ASML

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

5.0 mo

to disposition 15.4 mo

Statutes raised

101

1 actions read

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