Application

16047987 · SYSTEMS AND METHODS FOR COMPENSATING DISPERSION OF A BEAM SEPARATOR IN A SINGLE-BEAM OR MULTI-BEAM APPARATUS

Filed 2018-07-27 · Granted · Patent 11328894 (2022-05-10) The official file ↗The patent and its PDF ↗ · Art unit 2881 · Examiner James J Choi Hard · CPC H01J 37/05 · Hermes Microvision, Inc. · Finnegan/ASML

Office actions

first was Restriction requirement

RCEs

appealed

To first action

9.9 mo

to disposition 45.4 mo

Statutes raised

103

2 actions read

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