Application
16049003 · Planarization Process and Apparatus
Filed 2018-07-30 · Granted · Patent 10580659 (2020-03-03) The official file ↗The patent and its PDF ↗ · Art unit 2899 · Examiner Christopher A Johnson Typical · CPC H10P 95/06 · CANON KABUSHIKI KAISHA · CANON NANOTECHNOLOGIES, INC.
Office actions
1
first was Restriction requirement
RCEs
0
no appeal
To first action
8.0 mo
to disposition 19.1 mo
Statutes raised
103
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