Application

16061553 · METHOD FOR REMOVING PHOTOSENSITIVE MATERIAL ON A SUBSTRATE

Filed 2018-06-12 · Granted · Patent 10948825 (2021-03-16) The official file ↗The patent and its PDF ↗ · Art unit 2882 · Examiner Mesfin T Asfaw Typical · CPC G03F 7/2028 · ASML NETHERLANDS B.V. · Pillsbury Winthrop Shaw Pittman, LLP

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

21.5 mo

to disposition 33.1 mo

Statutes raised

102 103

2 actions read

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