Application

16093537 · A MEMBRANE FOR EUV LITHOGRAPHY

Filed 2018-10-12 · Granted · Patent 10908496 (2021-02-02) The official file ↗The patent and its PDF ↗ · Art unit 1724 · Examiner Stewart A Fraser Easy · CPC G03F 1/62 · ASML NETHERLANDS B.V. · Pillsbury Winthrop Shaw Pittman, LLP

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

20.3 mo

to disposition 27.7 mo

Statutes raised

102

1 actions read

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