Application

16098728 · HYDROGENATED ISOTOPICALLY ENRICHED BORONT TRIFLUORIDE DOPANT SOURCE GAS COMPOSITION

Filed 2018-11-02 · Granted · Patent 10920087 (2021-02-16) The official file ↗The patent and its PDF ↗ · Art unit 1736 · Examiner Wayne A Langel Typical · CPC C01B 35/061 · ENTEGRIS, INC. · Entegris, Inc.

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

17.0 mo

to disposition 27.5 mo

Statutes raised

102 103

2 actions read

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