Application

16102275 · METHOD AND APPARATUS FOR SELECTIVE NITRIDATION PROCESS

Filed 2018-08-13 · Granted · Patent 10950698 (2021-03-16) The official file ↗The patent and its PDF ↗ · Art unit 1718 · Examiner Charlee Bennett Typical · CPC H10D 64/035 · Applied Materials, Inc. · PATTERSON & SHERIDAN, LLP - - APPLIED MATERIALS

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

18.2 mo

to disposition 31.1 mo

Statutes raised

103 112

2 actions read

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