Application

16105312 · ATOMIC LAYER DEPOSITION OF ANTIMONY OXIDE FILMS

Filed 2018-08-20 · Granted · Patent 10699899 (2020-06-30) The official file ↗The patent and its PDF ↗ · Art unit 1713 · Examiner Lan Vinh Typical · CPC H10P 14/24 · ASM International N.V. · Knobbe, Martens, Olson & Bear, LLP

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

12.3 mo

to disposition 22.3 mo

Statutes raised

103 DP

1 actions read

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