PATLY.AIApplication
16154350 · MINIATURE ELECTRON BEAM LENS ARRAY USE AS COMMON PLATFORM EBEAM WAFER METROLOGY, IMAGING AND MATERIAL ANALYSIS SYSTEM
Filed 2018-10-08 · Abandoned The official file ↗ · Art unit 2881 · Examiner Sean M Luck Typical · CPC H01J 37/26 · Rowan TELS LLC
Office actions
2
first was Restriction requirement
RCEs
1
no appeal
To first action
12.8 mo
to disposition 34.6 mo
Statutes raised
102 103 112
2 actions read