Application

16155297 · METHOD OF ANALYZING SURFACE MODIFICATION OF A SPECIMEN IN A CHARGED-PARTICLE MICROSCOPE

Filed 2018-10-09 · Granted · Patent 10811223 (2020-10-20) The official file ↗The patent and its PDF ↗ · Art unit 2881 · Examiner James J Choi Hard · CPC H01J 37/3005 · FEI Company · FEI (Thermo)

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

10.1 mo

to disposition 24.4 mo

Statutes raised

103 DP

2 actions read

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